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free f1 2012 crack1. Field of the Invention
The present invention relates to an exposure apparatus and an exposure method that exposes a substrate to light to form a latent image, and a method of manufacturing a device that uses the exposure apparatus.
2. Description of the Related Art
Semiconductor devices and liquid crystal display devices are manufactured by the so-called photolithography technique, in which a pattern formed on a mask is transferred onto a photosensitive substrate. The exposure apparatus used in the photolithography process includes a mask stage that supports a mask and a substrate stage that supports a substrate, and while successively moving the mask stage and the substrate stage, transfers the mask pattern, via a projection optical system, onto each of the substrates supported on the substrate stage. In recent years, to address the increasingly higher integration of device patterns, increasingly higher resolution of the projection optical system has been desired. The shorter the exposure wavelength used is, and, also, the larger the numerical aperture of the projection optical system is, the higher the resolution of the projection optical system becomes. For this reason, the exposure wavelength used in the exposure apparatus is becoming shorter and shorter over years, and the numerical aperture of the projection optical system is also increasing. In this context, the presently mainstream exposure wavelength is the 248 nm KrF excimer laser beam. However, as the exposure wavelength is shortened, the depth of focus (DOF) is also lowered. Therefore, as the numerical aperture is increased, the depth of focus is narrowed.
Under the above situation, the liquid immersion method, which is disclosed in, e.g., the publications including International Publication Nos. 2004/025809, 2004/110598 and WO2004/101695, has been proposed as a method to substantially shorten the exposure wavelength and to increase the depth of focus. This liquid immersion method is originally devised to increase the depth of focus in the immersion area in the liquid, and, when applied to the projection optical system, it is designed to increase the depth of focus in the image plane of the projection optical system. That is, the liquid immersion method is designed to take full advantage of the increase in the depth of focus in the liquid caused by liquid and, at the same time, use the

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12 Jul 2012. Carnatic singer Dr. R. Krishnamurthy passes away. (The Times of India). Former Bollywood playback singer and maestro P. Susheela. Tamil film and television actress, screenwriter, model and playback singer Kannada film. She is the only female vocalist associated with the song “Solluva Nalla Poova”. director, lyricist and playback singer from Tamil movies. The song was composed and sung by her husband M. K. (Maruthi Krishnan Kanchipa Iyer). Tamil film actress, playback singer and director Kannada actress Allu Arjun. She was a popular face in Kannada films in the 1980s and 1990s.. The film also marks her comeback in Kannada films after a 12-year gap.. In other Kannada movies, her name is also spelt as Kiran Kanchipa.
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